Nitrogen Trifluoride (NF3) Kinoea Maʻemaʻe Kiʻekiʻe
ʻIkepili kumu
| CAS | 7783-54-2 |
| EC | 232-007-1 |
| UN | 2451 |
He aha kēia mea ?
ʻO ka Nitrogen trifluoride (NF3) he kinoea kala ʻole a ʻala ʻole ma ka lumi wela a me ke kaomi o ka lewa. Hiki ke hoʻokahe ʻia ma lalo o ke kaomi haʻahaʻa. Paʻa ka NF3 ma lalo o nā kūlana maʻamau a ʻaʻole hiki ke pohō. Eia naʻe, hiki ke decompose ke ʻike ʻia i nā wela kiʻekiʻe a i ʻole ke alo o kekahi mau catalysts. Loaʻa iā NF3 kahi mana hoʻomehana honua kiʻekiʻe (GWP) ke hoʻokuʻu ʻia i ka lewa.
Ma hea e hoʻohana ai i kēia mea?
Mea hoʻomaʻemaʻe i ka ʻoihana uila: Hoʻohana nui ʻia ʻo NF3 ma ke ʻano he mea hoʻomaʻemaʻe no ka wehe ʻana i nā mea haumia koena, e like me nā oxides, mai nā ʻili o nā semiconductor, plasma display panels (PDPs), a me nā mea uila ʻē aʻe. Hiki iā ia ke hoʻomaʻemaʻe pono i kēia mau ʻili me ka ʻole e hōʻino iā lākou.
ʻO ke kinoea etching i ka hana semiconductor: Hoʻohana ʻia ʻo NF3 ma ke ʻano he kinoea etching i ka hana hana o nā semiconductor. He mea maikaʻi loa ia i ka etching silicon dioxide (SiO2) a me ka silicon nitride (Si3N4), he mau mea maʻamau i hoʻohana ʻia i ka hana ʻana o nā kaʻa hui.
Ka hana ʻana o nā pūhui fluorine maʻemaʻe kiʻekiʻe: ʻO NF3 kahi kumu waiwai o ka fluorine no ka hana ʻana i nā pūhui fluorine like ʻole. Hoʻohana ʻia ia ma ke ʻano he precursor i ka hana ʻana i nā fluoropolymers, fluorocarbons, a me nā kemika kūikawā.
Hoʻokumu ʻia ka Plasma i ka hana hōʻikeʻike papa pālahalaha: Hoʻohana ʻia ʻo NF3 me nā kinoea ʻē aʻe e hana i ka plasma i ka hana ʻana i nā hōʻike papa pālahalaha, e like me nā hōʻike aniani wai (LCD) a me nā PDP. Pono ka plasma i ka waiho ʻana a me nā kaʻina hana etching i ka wā hana panel.
E hoʻomaopopo he ʻokoʻa paha nā noi a me nā lula no ka hoʻohana ʻana i kēia mea/huahana ma muli o ka ʻāina, ka ʻoihana a me ke kumu. E hahai mau i nā alakaʻi palekana a e nīnau i kahi loea ma mua o ka hoʻohana ʻana i kēia mea / huahana i kekahi noi.
